Product Description
This is a Kensington ‘MODEL 02 STAGE’ intended for use with large inspection microscopes. I believe this unit was removed from a KLA wafer inspection system. The stage linears are based on the familiar 8500 series stages, but the framework for the cross-roller bearings is open, and the glass scales are exposed. This was definitely meant for use in a clean-room environment.
Stage travel is 8 inches in both X and Y. There is a manual actuator knob for the Y axis (upper linear), but the actuator for the X axis is via a hex wrench. There is an 3 inch diameter stage with a built-in Z-axis motion. Range is unknown since there does not seem to be any manual actuator for the vertical motion.
The stage does not rotate. There are channels for vacuum retention of the wafer for any size up to 8 inches. The vacuum may be restricted to a particular size by exchanging the position of a small set screw in the upper stage. The stage baseplate has three leveling feet.
The apparatus is in exceptional condition. Includes EG&G Torque Systems Model MT2115-014DF DC motors on both X and Y axes. Motor for the Z axis is internal and the type could not be determined.
Location I1 L1
Photo set 1067