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Custom 2035-KRF Stepper Projection Lens with installed Diaphragm, 248nm

Custom 2035-KRF Stepper Projection Lens with installed Diaphragm, 248nm
Custom 2035-KRF Stepper Projection Lens with installed Diaphragm, 248nm
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Product Info

Manufacturer: Custom
Product Number: 2035-KRF
SKU#: 23140
In Stock: 1
Condition: USED
Cosmetic Condition: Excellent
Tested: N/A
Quantity:  
 
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Price: $560.00 
Location: Display 8-2
Added By: DVP
 

Product Description

This is a relatively simple photolithography optic that is corrected for a Krypton Fluoride laser (248nm wavelength). The lens elements would be of fused silica or quartz, transmissive in the deep UV region. The aperture of the front lens is approximately 75mm. The aperture of the concave portion of the rear element is approximately 18mm. The larger front portion of the barrel is 97mm in diameter and the smaller portion is 85mm. There is a 106mm diameter mounting flange. Overall length of the barrel is 252mm. There is a slot near the front elements into which fixed apertures may be inserted. Included is a hexagonal aperture. We did not remove the diaphragm to measure the aperture.

The lens is in very fine condition but we have no way to test its performance. The only markings on the lens were some hand-scribed numbers (2035, #10), and the letters KrF.

Photo set 1726
 



 
 
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