Unit is a KLA-Tencor 2401 viper automated macro-defect wafer inspection station.
From the manufacturer:
To maximize detection of all critical macro ADI defect types, the 2401 incorporates both brightfield and darkfield inspection technologies. Its advanced analysis capabilities, 80 wafer-per-hour throughput and advanced detection algorithms ensure detection of individual or continued excursions on any wafer at every layer. At the same time, recipe-configurable pass/fail settings enable faster, more accurate disposition decisions. A camera and optics calibration capability is designed into each tool, facilitating tool-to-tool matching, while an intuitive Windows® NT user interface, simple recipe creation, on-line documentation and CD-ROM-based training all contribute to tool ease-of-use.
- Frequency: 50/60 Hz
- Volts: 100-240
- Power: 200-240 vac; Single Phase
Removed from a research lab.
Clean room, wrapped, and crated.
All hard drives and software have been removed and will need to be sourced from the manufacturer.
This station has been tested and is in good working order.
Give us a call, we would be happy to discuss this item with you!