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The chamber is a horizontal cylinder 30 inch diameter by 39.5 inches long with an interior dimension of approximately 29 3/4".

* Water cooled stainless steel construction
* Hinged door with (2) 4 inch view ports. Door is hinged on left side
* Sources located in a well under chamber
* Bolted rear flat head

Roughing System

* The mechanical roughing/backing pump is missing
* 3 inch heated molecular sieve trap
* The rough valve is 3 inc “Vacuum Apparatus” Electro-pneumatic
* The fore-line valve is 2 inch electro-pneumatic

High Vacuum pumping system

* Varian 16 inch diffusion pump, 5 KW heater, 208 volt, 3 phase
* Water cooled pumping baffle
* Liquid Nitrogen cooled cold trap water vapor pump
* Center hinged Butterfly style high vacuum valve isolation valve

Vacuum instrumentation

* The Foreline & Chamber pressure are analog gauges DV-6M TC’s
* The system High Vacuum Gauge is a Veeco Model RG-830
* (2) hot cathode ion gauge tubes, one in the Diffusion Pump volume, the other in the chamber volume

Controls

* Circuit breaker power distribution panel – 100 amp main
* Resistance source 1 & 2
* Diffusion pump 30 amp, 3 phase
* Panel needs some rewiring
* 19” rack cabinet with miscellaneous controllers
* Sloan “Sequentorr” modified vacuum controller, cosmetically in good condition – Operational status unknown

Evaporation Sources

* (2) Resistance sources front & rear
* 5 KVA transformers, SCR driven primarily, 3/12 volt secondary
* One source is connected to chamber feedthrus, the second is not
* The chamber feedthrus are high current water cooled
* Each resistance source is supplied with current transformer and analog panel ammeter
* One pneumatic source shutter and rotary feedthru is supplied
* One Infinicon model XTC Thickness/Rate controller with single water cooled crystal head sensor, cable, oscillator and feedthru
* 3 U 19 inch chassis with:

* (2) Sloan Resistance Source SCR controllers
* (1) Planetary speed controller – no planetary
* LN2 controller
* Program control
* Power supply
* Cosmetically in good shape, missing some panel mounting screws- operational status-unknown

* Static substrate holder – holds (4) 5.875 inch substrates

Compressed air distribution manifold with Regulator, Oiler and water separator settlement bulb
Cooling water distribution manifold with supply and drain valves for:

Chamber

Crystal Sensor

Diffusion Pump Baffle

Resistance Source Feed-thrus